Resonac Europe

Anti-charging Material for Electron Beam Lithography​

Home Search results for: Anti-charging Material for Electron Beam Lithography​ ; About the product ; Mertis ; Usage example ; Others About the product A material for forming a removable polymer conductive film on the surface of semiconductor wafers or glass.​ The...

Cu and Barrier Metal Polishing Colloidal Silica Slurry

Home Search results for: Cu and Barrier Metal Polishing Colloidal Silica Slurry ; About the product ; Mertis About the product HS-T series is suitable for polishing films containing Cu, barrier metal, and SiO2 films, typically used for interconnect fabrication...

Ultra-low Defect Nano Ceria Slurry

Home Search results for: Ultra-low Defect Nano Ceria Slurry ; About the product ; Mertis About the product HS-1 series selectively removes SiO2 over other stopper films, making the slurry useful for STI process. Our unique nano ceria abrasive has small particle size...

High Removal Rate Ceria Slurry

Home Search results for: High Removal Rate Ceria Slurry ; About the product ; Mertis About the product HS-0 series efficiently removes high step-height oxide pattern, typically used for memory manufacturing process. These slurries combine our tailor-made abrasive with...

Functional High-Purity Solvent​

Home Search results for: Functional High-Purity Solvent​ ; About the product ; Mertis ; Product line-up ; CLP information About the product Resonac’s solvent for washing off residual resist, wax or flux in the manufacturing processes of semiconductors, LCDs, and...