RY Series for PKG Board
Photosensitive Dry Film “PHOTEC”
About the product
RY series are aqueous type photosensitive films used for high density semiconductor package. RY-5100UT series and RY-5800 series have excellent adhesion and resolution and less resist foot and the other advantage.
Features
- These films are suitable for semi-additive process with high adhesion, high resolution and stable line width.
- Shorter resist foot can contribute to finer pattern manufacturing. Excellent resist profile (smooth resist side wall) results in smooth plating line profile.
(In house evaluation data)
| Items | Units | RY-5107UT | RY-5110UT | RY-5125 |
|---|---|---|---|---|
| Resist thickness | µm | 7 | 10 | 25 |
| Minimum developing time | Sec. | 7 | 10 | 23 |
| Exposure energy | mJ/cm2 | 200 | 200 | 120 |
| Adhesion (L/S=x/3x) | µm | ≦3 | 4 | 6 |
| Resolution (L/S=x/x) | µm | ≦4 | 4 | 6 |
Projector machine; i-line projector
Developing conditions; 1.0 wt% Na2CO3aq, 30 ℃, Minimum developing time×2
RY-5107UT
(L/S= 4 μm / 4 μm)
Substrate surface roughness
Ra:100 nm
RY-5110UT
(L/S= 2 μm / 2 μm)
Substrate surface roughness
Ra:10 nm
RY-5825
(L/S= 6 μm / 6 μm)
Substrate surface roughness
Ra: 100 nm
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