High-Purity Sulfur Dioxide (SO2)
About the product
Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing is particularly suitable for etching organic films and chosen for etching carbon masks.
Merits
- A stable supply structure supported by a strong supply chain.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
| Appearance / colorless gas or liquid | Odor / pungent odor |
| CAS NO / 7647-01-0 | UN number / 1079 |
| High-pressure gas, liquefied gas | Toxic |
※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of SO2
| Item | Data |
|---|---|
| Physical state | Gas |
| Appearance | Liquefied gas |
| Color | Colorless |
| Odor | Pungent odor |
| Odor threshold (ppm) | 0.3 – 3 ppm |
| pH | Not applicable |
| Melting point | -75.5℃ |
| Boiling point | -10.0℃ |
| Flash point | Not applicable (incombustible) |
| Critical temperature | 51.49 ℃ |
| Autoignition point | Not applicable (incombustible) |
| Vapor pressure | 330 kPa (20℃) |
| Relative density | Relative vapor density 2.2 (air = 1) |
| Density | Gas 2.927 kg/m³ (0℃,101.3 kPa), Liquid 1.460 g/cm³ (-10℃) |
CLP information
| Press. Gas (Comp.), H280 | Acute Tox. 3, H331 |
| Skin Corr. 1B, H314 | Eye Dam. 1, H318 |
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