High-Purity Silicon Tetrafluoride (SiF4)
About the product
Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is chosen for various types of etching and forming SiOF or optical fibers.
Merits
- A stable supply structure supported by a strong supply chain.
- Proven sales track record with semiconductor makers.
- High-quality technical support based on extensive marketing experience.
Characteristics
Technical Data
| Appearance / colorless gas or liquid | Odor / pungent odor |
| CAS NO / 7783-61-1 | UN number / 1859 |
| Incombustible, corrosive gas | Toxic |
※ Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.
Physical & Chemical Properties of SiF4
| Item | Data |
|---|---|
| Physical state | Gas |
| Appearance | Liquefied gas |
| Color | Colorless |
| Odor | Characteristic odor (pungent odor) |
| pH | Not applicable |
| Melting point | -95.7 ℃ |
| Boiling point | -65℃ (0.2 MPa) |
| Flash point | Not applicable |
| Critical temperature | -14.20℃ |
| Critical pressure | 3.72 MPa |
| Relative vapor density (20℃) | 4.67 g/L (-1℃) |
| Relative density | 3.57 (air = 1, 15℃) |
| Density | 4.67 g/l (-1℃) |
CLP information
| Press. Gas (Comp.), H280 | Acute Tox. 2, H330 |
| Skin Corr. 1A, H314 | Eye Dam. 1, H318 |
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